Sputtering system reliability ..... for the last 25 years
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Sputtering system reliability ..... for the last 25 years |
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Automated Sputtering Systems |
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We specialize in manufacturing, re-engineering and fully automating high vacuum thin film physical vapor deposition equipment using RF, DC and ion beam sputtering techniques. Our robust fully computer automated sputtering systems are state of the art and can be easily tailored to meet each customers needs. The definition of sputtering: Sputtering is a physical vapor deposition (PVD) process whereby atoms in a solid target material are ejected into a gas phase due to bombardment of the target material by energetic ions (supplied by a plasma that is created by the sputtering system) and deposited onto a substrate (silicon wafers) in a uniform fashion under high vacuum. It is commonly used for thin-film deposition in the semiconductor industry. |
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