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About
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The System Interface Controller or SIC, is a software based process control system specifically designed to operate high vacuum thin
film sputtering systems. Our sputtering controller is powered by the National Instruments Data
Acquisition hardware and the LabVIEW graphical programming system.
Each of our MS Windows, PC based software control systems can be quickly
tailored to meet individual customer needs.
Click
to download Sic v360b op (password required)
Requires:
NI LabVIEW 6.1 runtime
NI Daq 6.9.2
Click to download Sic v412 demo (password required)
Requires:
NI LabVIEW 7.0 runtime
Highlights of our process control system (click below to expand list):
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General Features
- WYSIWYG screens for easy, intuitive, point-n-click
operation.
- Multi-tasking GUI application.
- Completely automated "one button operation" of
process runs.
- Software enabled Emergency Stop capability from every
screen.
- Automatic screen updates of all process data.
- Programmable process thresh holding capability.
- Automatic target time tracking system.
- Historically collected process data can be exported
in tab delimited text.
- Time/date stamp messaging system.
- Built-in, hidden log file system used for trouble
shooting.
-
Manual Operation
- Complete 3-D diagramed control/feedback screen.
- System operation with or without hazard interlocks.
- Ability to run macros for pumping, venting, loading,
unloading, cryo regeneration and more.
- Perform repeatability/reliability testing with sets
of macros.
- Access to all analog input and output signals.
- Access to all digital input signals.
-
Configuration Editors
- System, gas, target, head, setpoint, motion and scale
factor configuration editors.
- Operator defined process recipes will be allowed to
run based upon the configuration of the tool.
-
Recipe Editor
- Process recipe editor for operator defined recipes.
- Parameters include: run time, chamber base trip psi,
gas, pressure, table speed (where applicable), preclean load and tune,
substrate and target power supply.
-
Automated Run Features
- Ability to select which recipe as well as which step
to start with.
- Option to collect historical process data.
- Current date/time is used in the file name of
historical files.
- History data sampling rate selectable.
- Option to indicate Product Identifiers.
-
History Viewer
- Ability to search all history files for specific
Product Identifiers.
- Goto first warning (thresh holding) in an open
history file.
-
Security Features
- Protects different areas, abilities and aspects of
the software control system from unqualified personnel.
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